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Showing content from https://pubmed.ncbi.nlm.nih.gov/32289758/ below:

A MEMS nanoindenter with an integrated AFM cantilever gripper for nanomechanical characterization of compliant materials

Affiliations

• ¹ Physikalisch-Technische Bundesanstalt, 38116, Braunschweig, Germany.

• PMID: 32289758
• DOI: 10.1088/1361-6528/ab88ed

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Z Li et al. Nanotechnology. 2020.

• ¹ Physikalisch-Technische Bundesanstalt, 38116, Braunschweig, Germany.

• PMID: 32289758
• DOI: 10.1088/1361-6528/ab88ed

Item in Clipboard

This work presents the development of a MEMS nanoindenter that uses exchangeable AFM probes for quasi-static nanomechanical characterization of compliant and ultra-compliant materials. While the electrostatic micro-force transducer of the MEMS nanoindenter provides a maximum indentation depth up to 9.5 µm with a maximum output force of 600 µN, experimental investigations reveal that it can achieve a depth and force resolution better than 4 pm Hz^-1/2 and 0.3 nN Hz^-1/2, in air for f≥ 1 Hz. A passive AFM probe gripper is integrated into the MEMS nanoindenter, allowing the nanoindenter to utilize various AFM probes as an indenter for material testing. A proof-of-principle experimental setup has been built to investigate the performance of the MEMS nanoindenter prototype. In proof-of-principle experiments, the prototype with a clamped diamond AFM probe successfully identified an atomic step (∼0.31 nm) within a Si < 111 > ultraflat sample using the scanning probe microscopy mode. The nanomechanical measurement capability of the MEMS nanoindenter prototype has been verified by means of measurements of reference polymer samples using a silicon AFM probe and by means of measurements of the elastic properties of a PDMS sample using a spherical diamond-coated AFM probe. Owing to its compact and low-cost but high-resolution capacitive readout system, this MEMS nanoindenter head can be further applied for in-situ quantitative nanomechanical measurements in AFMs and SEMs.

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  Shakoor A, Gao W, Zhao L, Jiang Z, Sun D. Shakoor A, et al. Microsyst Nanoeng. 2022 Apr 29;8:47. doi: 10.1038/s41378-022-00376-0. eCollection 2022. Microsyst Nanoeng. 2022. PMID: 35502330 Free PMC article. Review.

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