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Showing content from https://pubmed.ncbi.nlm.nih.gov/29716381/ below:

A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements

Affiliations

• ¹ Department of Mechanical Engineering, Texas A&M University, College Station, Texas 77840, USA.
• ² Hysitron, Inc., 9625 West 76th Street, Minneapolis, Minnesota 55344, USA.

• PMID: 29716381
• DOI: 10.1063/1.5021046

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Youfeng Zhang et al. Rev Sci Instrum. 2018 Apr.

• ¹ Department of Mechanical Engineering, Texas A&M University, College Station, Texas 77840, USA.
• ² Hysitron, Inc., 9625 West 76th Street, Minneapolis, Minnesota 55344, USA.

• PMID: 29716381
• DOI: 10.1063/1.5021046

Item in Clipboard

We present a highly sensitive force-displacement transducer capable of performing ultra-shallow nanoindentation and adhesion measurements. The transducer utilizes electrostatic actuation and capacitive sensing combined with microelectromechanical fabrication technologies. Air indentation experiments report a root-mean-square (RMS) force resolution of 1.8 nN and an RMS displacement resolution of 0.019 nm. Nanoindentation experiments on a standard fused quartz sample report a practical RMS force resolution of 5 nN and an RMS displacement resolution of 0.05 nm at sub-10 nm indentation depths, indicating that the system has a very low system noise for indentation experiments. The high sensitivity and low noise enables the transducer to obtain high-resolution nanoindentation data at sub-5 nm contact depths. The sensitive force transducer is used to successfully perform nanoindentation measurements on a 14 nm thin film. Adhesion measurements were also performed, clearly capturing the pull-on and pull-off forces during approach and separation of two contacting surfaces.

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  Shakoor A, Gao W, Zhao L, Jiang Z, Sun D. Shakoor A, et al. Microsyst Nanoeng. 2022 Apr 29;8:47. doi: 10.1038/s41378-022-00376-0. eCollection 2022. Microsyst Nanoeng. 2022. PMID: 35502330 Free PMC article. Review.

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